. Problem of wear and friction of mechanically moving and load carrying elements
of micro and nano dimensions is considered. The electrochemical plating technology of
metals and alloys with inert hard nanoparticles in micromolds patterned in SU-8 negative
photoresist is one of the approaches to solve the problem. The influence of process parameters
on the mechanical properties of particle-reinforced coatings is described. The application of
nanocomposite materials to improve the mechanical properties of micro and nano components
in modern integrated systems is investigated. Codeposition model of nanocomcposite plating
is developed. The outlook of these materials and technologies for advanced micro- and
nanoelectromechanical systems of high reliability and their application is considered.
A method for manufacturing of holographic films with high runability for roll-to-roll
technology is described.
Keywords: electrochemical codeposition; nanostructured materials
full paper (pdf, 1456 Kb)