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The detailed structure, thermal and chemical stability of the Ag(PMe3)n compounds
were studied by applying quantum chemical method. The results obtained showed that
Ag(PMe3)2 and Ag(PMe3)4 could be used
as precursors for FEBID. The appearance energy of Ag
was evaluated to find the most promising dissociation ways.
Keywords: Ag compound, DFT calculation, dissociation, precursor |
full paper (pdf, 768 Kb)