In this work, zinc oxide thin films doped with Al were prepared using sol-gel
deposition technique. Fabricated films were up 1 µm thick and contain several layers of ZnO:Al
deposited on quartz substrate. The films had prevalent (001) growth orientation. The resistivity
of the films was reduced significantly after annealing in vacuum (10-5 Pa) at 650 °C and
achieved 0.3 ΩžÓm. The optical properties of ZnO:Al/AgNP films were tested. The extinction
spectra of the films showed the shift of AgNP plasmon resonance with respect to the position
being characteristic to silver nanoparticles on fused quartz substrate. The optical radiation
action increased the conductivity of ZnO:Al/AgNP films 5 times. An observation of
photocurrent was associated with the excitation of plasmon resonance in nanoparticles and was
described by the mechanism of "hot" electrons injection in the conduction band of ZnO: Al.
Keywords: zinc oxide thin films; doping of Al and Al/AgNP; sol-gel deposition technique; resistivity; optical properties.
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