Rev.Adv.Mater.Sci. (RAMS)
No 2, Vol. 18, 2008, pages 112-120

SURFACE CHARACTERISTICS OF NITROGEN AND ARGON PLASMA
IMMERSION ION IMPLANTATION OF Cu-Zr-Al BULK METALLIC ALLOY

T.L. Cheung and C.H. Shek

Abstract

Plasma Immersion ion implantation (PIII) offers a technique for metallic glasses to improve the surface properties. The (Cu50Zr50)92Al8 bulk metallic glass (BMG) has relatively high glass forming ability (GFA), it is chosen for surface modification experiment. The influences of nitrogen and argon ion implantation on (Cu50Zr50)92Al8 BMG were investigated. After PIII, the surfaces of implanted samples remain amorphous except that ZrO2 formed on the surface. We observed Cu and Al segregation beneath the top oxide layer after ion implantation.

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